Technical Information Magazine 202304-01 Evaluation of Thin Films Using Ellipsometry
This paper presents an analysis example of the temporal changes of PVA film immediately after spin coating using ellipsometry and the evaluation of inclined etching of silicon insulating films.
The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control. **Abstract** Spectroscopic ellipsometry is known as a method for measuring changes in the polarization state of light to evaluate optical constants (refractive index and extinction coefficient) and film thickness. This article presents analysis examples using the high-speed spectroscopic ellipsometer M-2000UI, which was introduced in 2021, focusing on the temporal changes immediately after spin-coating PVA films and the evaluation of inclined etching of silicon insulating films. **Table of Contents** 1. Introduction 2. About Ellipsometry 3. Temporal Changes Immediately After Spin-Coating PVA Films 4. Evaluation of Inclined Etching of Silicon Insulating Films 5. Conclusion
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